Materials science of thin films deposition and structure / Milton Ohring.

By: Contributor(s): Material type: TextLanguage: English Publisher: San Diego, CA : Academic Press, 2002Edition: 2. edDescription: xxi, 794 p. ill. 24 cmISBN:
  • 9780125249751
Subject(s): Additional physical formats: Print:: Materials science of thin filmsDDC classification:
  • 621.38152 O42 2002 22
LOC classification:
  • TA418.9.T45
Other classification:
  • Pci/DR
  • Pcid/DR
  • Pcig/DR
  • Pci
  • Pcid
  • Pcig
Online resources:
Contents:
A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films.
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Includes bibliographical references and index.

A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films.

Electronic reproduction. Amsterdam, The Netherlands Elsevier 2006.

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