Materials science of thin films deposition and structure /
Ohring, Milton, 1936-
Materials science of thin films deposition and structure / Milton Ohring. - 2. ed. - xxi, 794 p. ill. 24 cm.
Includes bibliographical references and index.
A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films.
Electronic reproduction.
Amsterdam, The Netherlands
Elsevier
2006.
9780125249751
Thin films.
TA418.9.T45
621.38152 O42 2002
Materials science of thin films deposition and structure / Milton Ohring. - 2. ed. - xxi, 794 p. ill. 24 cm.
Includes bibliographical references and index.
A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films.
Electronic reproduction.
Amsterdam, The Netherlands
Elsevier
2006.
9780125249751
Thin films.
TA418.9.T45
621.38152 O42 2002