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020 _a9780125249751
035 _a(WaSeSS)ssj0000199006
035 _a(ALMA)991000789732105936
035 _a(ALMA)993444358303662
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040 _aEEICP
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_dRIT
041 _aeng
050 4 _aTA418.9.T45
082 0 4 _a621.38152 O42 2002
_222
084 _aPci/DR
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100 1 _aOhring, Milton,
_d1936-
_0https://libris.kb.se/hftwzjk12p2vfjk#it
245 1 0 _aMaterials science of thin films
_bdeposition and structure /
_cMilton Ohring.
250 _a2. ed.
264 1 _aSan Diego, CA :
_bAcademic Press,
_c2002
300 _axxi, 794 p.
_bill.
_c24 cm.
504 _aIncludes bibliographical references and index.
505 8 _aA review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films.
533 _aElectronic reproduction.
_bAmsterdam, The Netherlands
_cElsevier
_d2006.
650 0 _aThin films.
710 2 _aElsevier Science Publishers.
776 0 8 _iPrint:
_aOhring, Milton,
_tMaterials science of thin films
_d1992
_z0125249756
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