TY  - BOOK
AU  - Ohring,Milton
ED  - Elsevier Science Publishers.
TI  - Materials science of thin films: deposition and structure 
SN  - 9780125249751
AV  - TA418.9.T45 
U1  - 621.38152 O42 2002 22
PY  - 2002///
CY  - San Diego, CA
PB  - Academic Press
KW  - Thin films
N1  - Includes bibliographical references and index; A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films; Electronic reproduction; Amsterdam, The Netherlands; Elsevier; 2006
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