deposition and structure Ohring, Milton 1936- creator Elsevier Science Publishers text bibliography xxu 2002 2. ed. monographic eng xxi, 794 p. ill. 24 cm. A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films. Milton Ohring. Includes bibliographical references and index. Electronic reproduction. Amsterdam, The Netherlands Elsevier 2006. 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