08484cam a22012137 4500 10208963 LIBRIS 20251215153920.0 cr ||| ||||| 060829s2002 xxua||||ob||||001 0|eng|c 9780125249751 (WaSeSS)ssj0000199006 (ALMA)991000789732105936 (ALMA)993444358303662 (ALMA)998217519303831 (EBZ)ebs352658e (EBZ)ebs352658e (EBZ)ebs352658e (ALMA)991000944295803211 (ALMA)999330187203663 (EBZ)ebs352658e (ALMA)99348392202456 EEICP EEICP RIT eng TA418.9.T45 621.38152 O42 2002 22 Pci/DR kssb/7 Pcid/DR kssb/7 Pcig/DR kssb/7 Pci kssb/7 Pcid kssb/7 Pcig kssb/7 Ohring, Milton, 1936- https://libris.kb.se/hftwzjk12p2vfjk#it Materials science of thin films deposition and structure / Milton Ohring. 2. ed. San Diego, CA : Academic Press, 2002 xxi, 794 p. ill. 24 cm. Includes bibliographical references and index. A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films. Electronic reproduction. Amsterdam, The Netherlands Elsevier 2006. Thin films. Elsevier Science Publishers. 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