Ohring, Milton,  1936- <br/><br/>
Materials science of thin films  deposition and structure / 
Milton Ohring. 
 - 2. ed. 
 - xxi, 794 p.  ill.  24 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/>A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films. 
<br/><br/><br/>Electronic reproduction. <br/>Amsterdam, The Netherlands <br/>Elsevier <br/>2006. 
<br/><br/><label>ISBN: </label>9780125249751 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Thin films.
<br/><br/><label>LC Class. No.: </label>TA418.9.T45 
<br/><br/><label>Dewey Class. No.: </label>621.38152 O42 2002